Programa
Nanopositioning and Nanomeasuring Machines – 3D from Macro to Nano
Prof. Dr.-Ing. Eberhard Manske
Ilmenau University - Germany
Resumen de la ponencia
Exact control over nanopositioning and nanomeasuring technology in working volumes of macroscopic measure is an essential precondition for the merge of technologies over scales and domains from macro to nano.
The goal of the DFG-funded Collaborative Research Centre SFB 622 "Nanopositioning and Nanomeasuring Machines" at the Ilmenau University of Technology is the development of scientific fundamentals of this technology along the boundaries of physical and technological feasibilities.
Currently measurements with a resolution of 0.1 nm are viable in a volume of 25 mm x 25 mm x 5 mm. Several high precision optical, mechanical and scanning force probes are developed and integrated into the NPM-machine for various applications. A machine NPMM 200 with a working volume of 200 mm x 200 mm x 25 mm and a resolution of 0.08 nm is under development. Further sensors and tools are in process.
Información sobre el ponente
Prof. Dr.-Ing. habil. Eberhard Manske holds a foundation professorship "Precision Measurement Technology" at the Ilmenau University of Technology, whereas this professorship was installed by the Sartorius AG in April 2008. He has been the spokesman of the collaborative research centre "SFB 622 - Nanopositioning and Nanomeasuring Machines" since June 2008, succeeding the initiator and long-standing head, Prof. Gerd Jäger.
After the completion of his studies of electrical engineering in 1982, Prof. Manske worked as a scientific co-worker at the Institute of Process Measurement and Sensor Technology at the Ilmenau University of Technology. In 1986, he obtained the doctoral degree, and in 2006 the postdoctoral lecturing qualification.
He focuses his research work mainly on nanopositioning and nanomeasuring technology, fibre-coupled laser interferometry, laser stabilization, optical and tactile precision sensors and scanning probe techniques.