Programme

Traceable Measurement of 3D Microparts

Marijn van Veghel
VSL - The Netherlands

Presentation abstract

Miniaturization has an enormous potential for increasing our quality of life by packing more functionality into a smaller volume. For the realization of this potential, it is important that the miniature components in question can be manufactured reliably. This in turn requires reliable measurements. As miniaturization becomes more and more a part of manufacturing practice, reliability no longer only means repeatability. Traceability is needed, i.e. conformation to absolute standards which are ultimately derived from the standard of length. For complex 3D micro-parts, the best route to traceability is a traceable micro-coordinate measuring machine (micro-CMM).
We will present how traceability is achieved for the 3D micro-CMM at VSL. This involves not only calibrating the instrument itself in order to provide a link to the standard of length, but also  providing traceability for the broad range of individual measuring tasks that can be performed on such an instrument.

Information about the speaker

Marijn van Veghel was born July 12th 1976 in ‘s-Hertogenbosch, the Netherlands. He obtained his MSc degree (cum laude) from Utrecht University in 1999 and a PhD in surface physics, also from Utrecht University, in 2004. After his PhD he joined the Dutch national metrology institute VSL as a scientist in the dimensional metrology group, specializing in co-ordinate metrology using scanning probe microscopy and 3D micro-CMM. Since 2008 he is part of the department of Customized Applied Metrology at VSL, which is focused on providing customer-specific metrology solutions for industry.