Programm
Nano-CMM instrumentation for large volume characterization of 3D micro-features: The Nano-CMM approach
Dr. Oscar Lazaro
Asociacion Innovalia - Spain
Resumen de la ponencia
Over the recent years, micro-features as part of micro-manufacturing processes are taking increasing relevance. Such micro aspects are key in developing the capabilities and performances of next generation products. Biology, health, electronic, optics, transportation and energy industries are examples of business sectors already benefiting from such processes. However, compared to manufacturing processes at the micro- and nano-meter level, the ability to control, measure and characterise such dimensional features in 3D needs to be further developed. Micro- and nano-metrology are key technologies that need proper consideration to address the issue. Hence, both specific procedures and instrumentation need to be designed, developed and evaluated at nanometer scales to leverage the mass production of micro-manufacturing products.
The paper will cover the current challenges faced by key industries in terms of carrying out their quality control process at the micro- and nano-dimensions. The paper will highlight key aspects that need to be characterized and discuss the main issues in terms of accessibility, accuracy, precision and uncertainty faced by 3D micro-metrology. The talk will present the multi-orientation, multi-probe approach proposed by the Nano-CMM project to deal with the micro-feature characterization and its application in the development of a flexible universal measurement machine. Finally, the realization of such concepts in the form of the first Nano-CMM prototypes already fabricated will also be presented.
Información sobre el ponente
Dr. Oscar Lazaro graduated in Telecommunications Engineering from the Universidad Politecnica de Valencia (UPV) 1997, and received his Ph.D. degree in Electrical Engineering from Strathclyde University (Glasgow) in 2001. In 1998, he was awarded a Professional Specialisation Grant from the Spanish Government to work at the Optical Industrial Association (AIDO) researching on artificial vision systems for industrial applications. He has also been twice recipient of a UK Royal Academy of Engineering Grant. In 2004 he joined, the Innovalia Association, where he initially coordinated national and European research activities and now acts as Managing Director. Since 2006, he is responsible for the coordination of the Nano-CMM Integrated Project funded by the FP6 European R&D Programme.